Ultra-high vacuum magnetron sputtering coating machine

This fully automatic magnetron sputtering coating machine has the following advantages:

1. Currently, the laboratory space in universities and research institutes is relatively tight, so the compact design of this small magnetron sputtering coating machine is more suitable;

2. Equipped with 3 three-inch electro-controlled baffle magnetron sputtering targets with adjustable height and angle (high magnetic targets can be selected to coat magnetic materials such as iron and nickel);

3. Equipped with a 4-inch rotatable, heatable sample stage with an attachable bias power supply;

4. Equipped with an ion activation device;

5. Equipped with an inner baffle for easy cleaning and an observation window with a baffle;

6. Equipped with a chamber baking heating device;

7. Equipped with a high vacuum acquisition and measurement device;

8. Equipped with a real-time film thickness monitoring and measurement device;

9. Equipped with a three-way mass flow meter gas charging system.