Small desktop magnetron sputtering coating machine

1. Equipment Introduction

　　This equipment is a small magnetron sputtering coating machine. Its main features are small size, simple and compact structure, easy operation, and low power requirements for the laboratory; the main components of this series of equipment use imported or domestic configurations to improve the stability of the equipment; in addition, the independently developed intelligent operating system provides better protection in terms of equipment operation repeatability and safety.

　　The equipment is standard equipped with two Φ2-inch permanent magnet targets, one 500W DC sputtering power supply (for sputtering conductive metal materials), and one 300W fully automatic matching RF sputtering power supply (for sputtering insulating materials). It is mainly used to develop nano-scale single-layer and multi-layer metal conductive films, semiconductor films, and insulating films.

　　2. Main Technical Parameters

　　2.1 Chamber size: Ф246×228mm, 1Cr18Ni9Ti high-quality stainless steel material, argon arc welding;

　　2.2 Sample stage size: Ф75mm, height: 60～120mm adjustable, rotation: 0-20r/min adjustable; can be heated to 600℃;

　　2.3 Vacuum system: Mechanical pump (TRP-12, 3L/S) + oil-lubricated molecular pump (FF-63/80, 70L/s); GDC-25b electromagnetic baffle valve, DN63mm flow control valve;

　　2.4 Ultimate vacuum: 8.0×10-5Pa;

　　2.5 Vacuum pumping speed: Atmospheric pressure～8×10-4Pa ≤ 20min;

　　2.6 Vacuum measurement: Full-range composite vacuum gauge, measurement range: 105Pa～10-5Pa;

　　2.7 Magnetron target: 2 Φ2-inch (including target baffle), compatible with DC power supply and RF power supply;

　　2.8 Sputtering power supply: 1 500W DC sputtering power supply and 1 300W fully automatic matching RF power supply;

　　2.9 Mass flow meter: One set each of imported 20sccm and 50sccm mass flow controllers;

　　2.10 Control method: PLC+touch screen intelligent control system, with functions such as leakage self-check and prompt, communication fault self-check, and maintenance prompt;

　　2.11 Equipment appearance: L60cm×W60cm×H96cm mechatronics rack, with one KF40 and one CF35 flange interface reserved;

　　2.12 Equipment power supply total power ≤2KW, 220V, single-phase three-wire system (one live wire, one neutral wire, one ground wire);

　　2.13 Cooling circulation system: Water pressure 0.2～0.4MPa, water temperature 10～25℃, providing stable cooling water for the water-cooled components of the equipment;

　　3. Equipment Main Configuration Table

　　4. Main Advantages of the Equipment

　　4.1 Practicality:

　　4.1.1 High equipment integration, compact structure, small footprint, can be placed on the experimental table;

　　4.1.2 By changing the upper and lower flanges of the equipment, the magnetron and evaporation functions can be switched, realizing one machine for multiple uses;

　　4.2 Convenience:

　　4.2.1 The parts of the equipment that need to be disassembled all adopt a plug-and-play method. The wiring and installation and debugging are simple, which ensures both the convenience of the equipment and its neatness;

　　4.2.2 The equipment can place the host inside the glove box, and water, electricity, and gas are connected to the outside of the glove box through four KF40 interfaces, making the connection with the glove box flexible and convenient;

　　4.2.3 The equipment operating voltage is 220V, and the total power is less than 2KW, which has low requirements for laboratory power supply;

　　4.3 Stability:

　　4.3.1 The main components of the equipment use imported or well-known domestic brands, ensuring the quality and stability of the equipment;

　　4.4 Advanced Features:

　　4.4.1 Independently developed PLC+touch screen intelligent operating system, with intelligent control mode and debugging and maintenance mode;

　　4.4.2 The control system has a leak detection and prompt function. When the equipment leaks, the system will automatically prompt the equipment leak, so that the user can check for leaks and ensure the normal and stable operation of the equipment;

　　4.4.3 The control system has a maintenance prompt function. When the equipment runs for a certain period of time, the system will automatically prompt the equipment to be maintained, so that the user can maintain it in time and ensure the normal and stable operation of the equipment;

　　4.4.4 The control system has a communication fault self-check function. The system self-checks the communication of components such as molecular pumps, sputtering power supplies, vacuum gauges, motors, and flow meters. If a component fails, it can be checked according to the fault query method of each component in the system to promptly confirm the cause of the fault and ensure equipment safety;

　　4.4.5 The control system has data recording and export functions. The control system records the equipment's operation records and coating process data, which can be viewed in the system or exported using a U disk;

　　4.4.6 The system has three levels of password protection, with different levels and different usage permissions to ensure the security of the equipment and the confidentiality of the data;

　　5. Equipment Installation Conditions (User Provided)

　　5.1 Power Supply Requirements

　　5.1.1 The total power supply of the equipment ≤2KW, 220V, single-phase three-wire system (one live wire, one neutral wire, one ground wire);

　　5.1.2 The distance between the socket and the equipment size ≤2m;

　　5.1.3 Others: If the user chooses a cooling circulating water machine or other optional accessories, the user should prepare the power supply requirements for the additional accessories themselves, which are not within the scope of the installation conditions;

　　5.2 Water Supply Requirements

　　5.2.1 The parts of the equipment that require water cooling are the magnetron target and the film thickness meter probe (if a film thickness control system is selected);

　　5.2.2 Water pressure 0.2～0.4MPa, water temperature 10～25℃;

　　5.3 Installation Site Size Requirements

　　The equipment size is: length × width: L60cm × W60cm, the recommended installation site size ≥L60 × W80cm.

　　5.4 Other Requirements

　　5.4.1 Ambient temperature: 5～40℃;

　　5.4.2 Ambient humidity: <85%R.H;

　　5.4.3 The room is free of large amounts of dust, corrosive, flammable, and explosive gases;

　　6. Equipment Service Commitment

　　Dear Customer:

　　First of all, thank you for your trust in our company's products!

　　Our company, based on the principle of "providing the best quality products at the most reasonable price and with the most comprehensive service," solemnly promises you:

　　6.1 After-sales Service Commitment

　　6.1.1 The product warranty period is one year;

　　6.1.2 During the warranty period, the supplier will repair and replace free of charge any damage to components caused by equipment quality problems;

　　6.1.3 Outside the warranty period, for damage to equipment components, the accessories provided will only charge the cost price;

　　6.1.4 If the equipment malfunctions during or outside the warranty period, after the supplier receives the user's formal notification (including telephone or email notification), our company's technicians will arrive at the technical service site within 48 hours and start repairs.