Beijing Wayes Vacuum Technology Application Co., Ltd.
Equipment Integration
Equipment Integration Equipment integration
Manual magnetron sputtering coating machine
This manual magnetron sputtering coating machine has the following advantages: 1. Currently, laboratory space in universities and research institutes is relatively limited, so the compact design of this small magnetron sputtering coating machine is more suitable; 2. Configured with 3 3-inch electronically controlled baffle magnetron sputtering targets with adjustable height and angle (high magnetic targets can be selected for coating magnetic materials such as iron and nickel); 3. Configured with 1 4-inch sample stage that is rotatable, heatable, and can be equipped with a bias power supply; 4. Configured with an ion activation device; 5. Configured with internal baffles for easy cleaning and an observation window with baffles; 6. Configured with a chamber baking and heating device.
Category:
Magnetron sputtering coating machine
Product description
This manual magnetron sputtering coating machine has the following advantages:
1. Currently, the laboratory space in universities and research institutes is relatively limited, so the compact design of this small magnetron sputtering coating machine is more suitable;
2. Equipped with 3 three-inch electrically controlled baffle magnetron sputtering targets with adjustable height and angle (high magnetic targets can be selected to deposit magnetic materials such as iron and nickel);
3. Equipped with a 4-inch rotatable, heatable sample stage with an attachable bias power supply;
4. Equipped with an ion activation device;
5. Equipped with an inner baffle for easy cleaning and a viewing window with a baffle;
6. Equipped with a chamber baking heating device;
7. Equipped with a high vacuum acquisition and measurement device;
8. Equipped with a real-time film thickness monitoring and measurement device;
9. Equipped with a three-channel mass flow meter gas filling system.
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