Equipment Integration Equipment integration


+
  • 1_0002_图层 2(3).jpg
  • 1_0003_图层 3(1).jpg
  • 1_0001_图层 4.jpg
  • 1_0000_图层 5(4).jpg

Manual magnetron sputtering coating machine

This manual magnetron sputtering coating machine has the following advantages: 1. Currently, laboratory space in universities and research institutes is relatively limited, so the compact design of this small magnetron sputtering coating machine is more suitable; 2. Configured with 3 3-inch electronically controlled baffle magnetron sputtering targets with adjustable height and angle (high magnetic targets can be selected for coating magnetic materials such as iron and nickel); 3. Configured with 1 4-inch sample stage that is rotatable, heatable, and can be equipped with a bias power supply; 4. Configured with an ion activation device; 5. Configured with internal baffles for easy cleaning and an observation window with baffles; 6. Configured with a chamber baking and heating device.

Category:

Magnetron sputtering coating machine


Product description

  This manual magnetron sputtering coating machine has the following advantages:

  1. Currently, the laboratory space in universities and research institutes is relatively limited, so the compact design of this small magnetron sputtering coating machine is more suitable;

  2. Equipped with 3 three-inch electrically controlled baffle magnetron sputtering targets with adjustable height and angle (high magnetic targets can be selected to deposit magnetic materials such as iron and nickel);

  3. Equipped with a 4-inch rotatable, heatable sample stage with an attachable bias power supply;

  4. Equipped with an ion activation device;

  5. Equipped with an inner baffle for easy cleaning and a viewing window with a baffle;

  6. Equipped with a chamber baking heating device;

  7. Equipped with a high vacuum acquisition and measurement device;

  8. Equipped with a real-time film thickness monitoring and measurement device;

  9. Equipped with a three-channel mass flow meter gas filling system.